Electric furnace for substrate processing apparatus



FIG. 1 is a front, bottom and left side perspective view of an electric furnace for substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a right side elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a rear elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof.

FIG. 8 is a cross-sectional view take along line 8-8 in FIG. 2 thereof; and,

FIG. 9 is an enlarged portion view taken along line 9-9 in FIG. 2.

In FIG. 8, the broken lines depict unclaimed subject matter only and form no part of the claimed design. 

CLAIM The ornamental design for an electric furnace for substrate processing apparatus, as shown and described. 